Analysis of Desorbed Gases from Surface: Thermal Desorption Spectroscopy
Work
Year: 2007
Type: article
Abstract: Thermal desorption spectroscopy (TDS) has been commonly employed to evaluate the outgassing properties of both vacuum materials and thin films. Hydrogen, water, CO and CO2 —the most dominant gas speci... more
Source: Shinku
Author Sakae INAYOSHI
Cites: 14
Cited by: 5
Related to: 10
FWCI:
Citation percentile (by year/subfield): 69.9
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze