Work

Experimental characterization of two-dimensional dopant profiles in silicon using chemical staining

Year: 1988

Type: article

Source: Applied Physics Letters

DOI: 10.1063/1.99559

Authors: Ravi Subrahmanyan, Hisham Z. Massoud, Richard B. Fair

Institution: Duke University

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1987354054

FWCI: 1.347

Cites: 7

Cited by: 16

Related to: 10