Support loss in the radial bulk-mode vibrations of center-supported micromechanical disk resonators
Year: 2006
Type: article
Source: Sensors and Actuators A Physical
Authors: Zhili Hao, Farrokh Ayazi
Institution: Georgia Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1988329500