Measurement and Characterization of Stiction Force in Microstructures With Tapered Features
Year: 2011
Type: conference-paper
Authors: Christopher Pelzmann, Laxman Saggere
Institution: University of Illinois Chicago
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: National Science Foundation
OpenAlex ID: W1988789484
