Work

Energy dissipation in micromechanical resonators

Year: 2011

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.884731

Authors: Farrokh Ayazi, Logan Sorenson, Roozbeh Tabrizian

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1989631495

FWCI: 3.038

Cites:

Cited by: 40

Related to: 10