Work

AES and XPS study of thin RF-sputtered Ta2O5 layers

Year: 1995

Type: article

Source: Applied Surface Science

DOI: 10.1016/0169-4332(94)00538-9

Authors: E. Atanassova, T. Dimitrova, J. Koprinarova

Institutions: Bulgarian Academy of Sciences, Georgi Nadjakov Institute of Solid State Physics

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1989915280

FWCI: 2.778

Cites: 35

Cited by: 202

Related to: 10