Optimization, simulation, and fabrication of a microgyroscope
Year: 2001
Type: conference-paper
DOI: 10.1117/12.443038
Authors: Shifeng Li, Shaochen Chen
Institution: Iowa State University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1990178142