Work

Real-time spectroscopic ellipsometry monitoring of Si1−xGex/Si epitaxial growth

Year: 1995

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/1.579818

Authors: C. Pickering, D. A. O. Hope, R. T. Carline, D. J. Robbins

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1990404655

FWCI: 1.969

Cites:

Cited by: 17

Related to: 10