Impurity Diffusion During RTA
Year: 1984
Type: article
Source: MRS Proceedings
DOI: 10.1557/proc-35-381
Author: R.B. Fair
Institution: MCNC Research and Development Institute
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1991293860