Work

Analysis and Fabrication Process of an Electro-Magnetically Actuated Valveless Micropump with Two Parallel Flexible Diaphragms

Year: 2005

Type: article

Source: Proceedings of the Institution of Mechanical Engineers Part C Journal of Mechanical Engineering Science

DOI: 10.1243/095440605x31841

Authors: Y Su, W Chen, F Cui, W Zhang

Institution: Shanghai Jiao Tong University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1991521579

FWCI: 0.634

Cites: 17

Cited by: 4

Related to: 10