Work

CMOS resonant sensors

Year: 1998

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.323895

Authors: Oliver Brand, Mark Hornung, Dirk Lange, Henry Baltes

Institution: ETH Zurich

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1991584769

FWCI:

Cites:

Cited by: 3

Related to: 10