An empirical study of design-of-experiment data mining for yield-loss diagnosis for semiconductor manufacturing
Year: 2013
Type: article
Authors: Chen-Fu Chien, Kuo-Hao Chang, Wen-Chih Wang
Institution: National Tsing Hua University
Language: English
Field: Decision Sciences
Domain: Social Sciences
Open Access status: closed
OpenAlex ID: W1991691583