Work

Low-power MOEMS components for active optical systems

Year: 2005

Type: article

Source: Journal of Micro/Nanopatterning Materials and Metrology

DOI: 10.1117/1.2121087

Authors: James Castracane, Dong Yan, Seth C. Madison, Ganesh Panaman, Bai Xu

Institution: University at Albany, State University of New York

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Defense Advanced Research Projects Agency

OpenAlex ID: W1992060177

FWCI: 0.317

Cites: 4

Cited by: 4

Related to: 10