An intrinsic stress scaling law for polycrystalline thin films prepared by ion beam sputtering
Year: 1987
Type: article
Source: Journal of Applied Physics
DOI: 10.1063/1.339560
Author: H. Windischmann
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Curtin University of Technology
OpenAlex ID: W1992633939