Work

Fabrication of soft nanoimprint stamps and polymer subwavelength gratings by spin coating techniques

Year: 2005

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.571986

Authors: Yoshiaki Kanamori, Emmanuel Roy, Yong Chen

Institution: Centre National de la Recherche Scientifique

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1992966439

FWCI:

Cites:

Cited by: 2

Related to: 10