Work

X-Ray Projection Lithography Using a Fresnel Zone Plate

Year: 1995

Type: article

Source: Japanese Journal of Applied Physics

DOI: 10.1143/jjap.34.6748

Authors: Naoe Koyama, Haruo Tsuyuzaki, Kenichi Kuroda, Akinori Shibayama Akinori Shibayama

Institution: NTT (Japan)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1993754980

FWCI: 0.479

Cites: 9

Cited by: 2

Related to: 10