Work

Micropump based on PZT unimorph and one-way parylene valves

Year: 2004

Type: article

Source: Journal of Micromechanics and Microengineering

DOI: 10.1088/0960-1317/14/4/001

Authors: Guo-Hua Feng, Eun Sok Kim

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Defense Advanced Research Projects Agency

OpenAlex ID: W1994588140

FWCI: 9.191

Cites: 11

Cited by: 107

Related to: 10