Work

Vacancy generation in liquid phase epitaxy of Si

Year: 2007

Type: article

Abstract: Concerted experiments and theoretical analysis are applied to conclusively demonstrate the vacancy generation during fast melting and regrowth of Si by laser irradiation. Experiments, based on the positron annihilation spectroscopy and designed to test the theoretical predictions, evidence a vacancy supersaturation after the laser process depending on the irradiation conditions. Stochastic atomistic simulations of the molten Si recrystallization show trapping of vacancies in the recrystallized region. Finally, continuum phase-field simulations of the full process, calibrated using the Monte Carlo results, show a defect evolution in close agreement with the experiments.

Source: Physical Review B

DOI: 10.1103/physrevb.75.235201

Authors: A. La Magna, V. Privitera, Guglielmo Fortunato, Massimo Cuscunà, B. G. Svensson, E. Monakhov, K. Kuitunen, J. Slotte, F. Tuomisto

Institutions: Institute for Microelectronics and Microsystems, University of Oslo

Language: English

Topic: Muon and positron interactions and applications

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: bronze

Funders: Ministero dell’Istruzione, dell’Università e della Ricerca, Universitetet i Oslo

OpenAlex ID: W1994790970

FWCI: 3.396

Cites: 18

Cited by: 21

Related to: 10