Acoustically Actuated Flextensional Si $_x$ N $_y$ and Single-Crystal Silicon 2-D Micromachined Ejector Arrays
Year: 2004
Type: article
Institutions: Stanford University, University of Helsinki
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: National Science Foundation
OpenAlex ID: W1995065282