Complementary Metal Oxide Semiconductor Cantilever Arrays on a Single Chip: Mass-Sensitive Detection of Volatile Organic Compounds
Year: 2002
Type: article
Source: Analytical Chemistry
DOI: 10.1021/ac011269j
Institution: ETH Zurich
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1995437468
