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Desktop nanofabrication with massively multiplexed beam pen lithography

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Year: 2013
Type: article
Source: Nature Communications
DOI: 10.1038/ncomms3103
Authors: Xing Liao, Keith A. Brown, Abrin L. Schmucker, Guoliang Liu, Shu He, Wooyoung Shim, Chad A. Mirkin
Institutions: Northwestern University, International Institute for Nanotechnology
Language: English

Topic: Nanofabrication and Lithography Techniques
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences

Open Access status: bronze

Funders: National Science Foundation, Chicago Community Trust, Northwestern University, Asian Office of Aerospace Research and Development, National Institutes of Health, Defense Advanced Research Projects Agency, International Institute for Nanotechnology, Northwestern University, National Cancer Institute, Air Force Office of Scientific Research
Awards: G1523888516, G1745892387, NEB: Scalable Sensing, Storage and Computation with a Rewritable Oxide Nanoelectronics Platform, Collaborative Research: IDBR: The Nanosizer: A New Nanolithographic Tool for Preparing Combinatorial Arrays in Situ, G3591598716, G6071252945, G6143360151, G738337779, G7830320759, G8466856400, G9000069016
OpenAlex ID: W1995654037
FWCI: 6.377
Cites: 30
Cited by: 97
Related to: 10
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