Work

Roller nanoimprint lithography

Year: 1998

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.590438

Authors: Hua Tan, Andrew Gilbertson, Stephen Y. Chou

Institutions: Princeton University, University of Minnesota

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1996389496

FWCI: 2.636

Cites: 5

Cited by: 319

Related to: 9