Grazing-incidence small angle x-ray scattering studies of nanoscale polymer gratings
Year: 2015
Type: conference-paper
DOI: 10.1117/12.2085824
Institutions: Argonne National Laboratory, University of Chicago, IMEC, KU Leuven
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1997049277
