Work

I n s i t u laser diagnostic studies of plasma-generated particulate contamination

Year: 1989

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/1.576175

Authors: G. S. Selwyn, J. Singh, R. S. Bennett

Institutions: IBM Research - Thomas J. Watson Research Center, IBM (United States)

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1997384506

FWCI: 17.06

Cites:

Cited by: 492

Related to: 10