Work

Study on demolding temperature in thermal imprint lithography via finite element analysis

Year: 2008

Type: article

Source: Microsystem Technologies

DOI: 10.1007/s00542-008-0563-x

Authors: Zhichao Song, Byoung Hee You, Jaejong Lee, Sunggook Park

Institutions: Louisiana State University, Korea Institute of Machinery & Materials

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1997476216

FWCI: 0.884

Cites: 9

Cited by: 21

Related to: 10