Work

Cantilever-free thermal actuation

Year: 2013

Type: article

Source: Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI: 10.1116/1.4818259

Authors: Keith A. Brown, Daniel J. Eichelsdoerfer, Chad A. Mirkin

Institutions: Northwestern University, International Institute for Nanotechnology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1997680425

FWCI: 0.599

Cites: 32

Cited by: 6

Related to: 10