Work

Interaction between abrasive particles and film surfaces in low down force Cu CMP

Year: 2004

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-816-k4.8

Authors: Yuchun Wang, Isaac Zomora, Joe Hawkins, Renjie Zhou, Fred Sun, Roy Martinez, Jian Zhang, Bin Lu, Shumin Wang

Institution: Cabot Microelectronics (United States)

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1997942029

FWCI: 1.034

Cites: 1

Cited by: 4

Related to: 10