Work

Defect cluster analysis to detect equipment-specific yield loss based on yield-to-area calculations

Year: 1997

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.284694

Authors: Christopher Hess, Larg H. Weiland

Language: English

Topic: Industrial Vision Systems and Defect Detection

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Deutsche Forschungsgemeinschaft

OpenAlex ID: W1998202781

FWCI:

Cites: 5

Cited by:

Related to: 10