Work

Integration of self-assembled diblock copolymers for semiconductor capacitor fabrication

Year: 2001

Type: article

Source: Applied Physics Letters

DOI: 10.1063/1.1383805

Authors: C. T. Black, K. W. Guarini, K. R. Milkove, S. M. Baker, T. P. Russell, M. T. Tuominen

Institutions: IBM Research - Thomas J. Watson Research Center, University of Massachusetts Amherst

Language: English

Topic: Block Copolymer Self-Assembly

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1998241405

FWCI: 12.12

Cites: 12

Cited by: 354

Related to: 10