Study of Dill's B parameter measurement of EUV resist
Year: 2015
Type: conference-paper
DOI: 10.1117/12.2082883
Authors: Atsushi Sekiguchi, Yoko Matsumoto, Tetsuo Harada, Takeo Watanabe, Hiroo Kinoshita
Institutions: Litho Tech Japan Corporation (Japan), University of Hyogo
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1998302214