Year: 2015
Type: article
Abstract: Metal-oxide (MO) semiconductors have emerged as enabling materials for next generation thin-film electronics owing to their high carrier mobilities, even in the amorphous state, large-area uniformity, low cost, and optical transparency, which are applicable to flat-panel displays, flexible circuitry, and photovoltaic cells. Impressive progress in solution-processed MO electronics has been achieved using methodologies such as sol gel, deep-UV irradiation, preformed nanostructures, and combustion synthesis. Nevertheless, because of incomplete lattice condensation and film densification, high-quality solution-processed MO films having technologically relevant thicknesses achievable in a single step have yet to be shown. Here, we report a low-temperature, thickness-controlled coating process to create high-performance, solution-processed MO electronics: spray-combustion synthesis (SCS). We also report for the first time, to our knowledge, indium-gallium-zinc-oxide (IGZO) transistors having densification, nanoporosity, electron mobility, trap densities, bias stability, and film transport approaching those of sputtered films and compatible with conventional fabrication (FAB) operations.
Institutions: University of Electronic Science and Technology of China, State Key Laboratory of Electronic Thin Films and Integrated Devices, Northwestern University, Istituto Nazionale di Fisica Nucleare, National Interuniversity Consortium for the Physical Sciences of Matter, Istituto Nazionale di Fisica Nucleare, Sezione di Milano, Politecnico di Milano
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
Funders: National Science Foundation, W. M. Keck Foundation, Northwestern University, University of Electronic Science and Technology of China, Materials Research Science and Engineering Center, Harvard University, Multidisciplinary University Research Initiative, Materials Research Science and Engineering Center, Northwestern University, Office of Naval Research, Division of Materials Research
OpenAlex ID: W1998341591