Work

Printed MEMS membranes on silicon

Year: 2012

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2012.6170156

Authors: Apoorva Murarka, Sarah Paydavosi, Trisha Andrew, Annie Wang, Jeffrey Lang, Vladimir Bulovic

Institution: Massachusetts Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Deshpande Center for Technological Innovation, Massachusetts Institute of Technology

OpenAlex ID: W1998457216

FWCI: 0.817

Cites: 5

Cited by: 4

Related to: 10