Work

SU-8 2002 Surface Micromachined Deformable Membrane Mirrors

Year: 2012

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2012.2215010

Authors: Sarah J. Lukes, David L. Dickensheets

Institution: Montana State University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1998547326

FWCI: 2.249

Cites: 40

Cited by: 34

Related to: 10