Work

Ultrahigh vacuum–scanning tunneling microscopy nanofabrication and hydrogen/deuterium desorption from silicon surfaces: implications for complementary metal oxide semiconductor technology

Year: 1998

Type: article

Source: Applied Surface Science

DOI: 10.1016/s0169-4332(98)00054-3

Authors: J.W. Lyding, K. Hess, G.C. Abeln, D.S. Thompson, J.S. Moore, M.C. Hersam, E.T. Foley, J. Lee, Z. Chen, S.T. Hwang, H. Choi, Ph. Avouris, I.C. Kizilyalli

Institutions: University of Illinois Urbana-Champaign, IBM Research - Thomas J. Watson Research Center, Alcatel-Lucent (France)

Language: English

Topic: Surface and Thin Film Phenomena

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

Funder: Beckman Institute for Advanced Science and Technology, University of Illinois, Urbana-Champaign

OpenAlex ID: W1999302983

FWCI: 1.958

Cites: 23

Cited by: 34

Related to: 10