Phase Formation of Platinum Silicides Formed by Ion Implantation
Year: 1991
Type: article
Source: MRS Proceedings
DOI: 10.1557/proc-235-325
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
Funder: U.S. Air Force
OpenAlex ID: W2000507537
