Work

Toward smart micromachines with integrated feedback control

Year: 2007

Type: conference-paper

Source: International Semiconductor Device Research Symposium

DOI: 10.1109/isdrs.2007.4422471

Authors: Mustafa Ilker Beyaz, Nima Ghalichechian, Reza Ghodssi

Institution: University of Maryland, College Park

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2000668923

FWCI: 0.503

Cites: 3

Cited by: 1

Related to: 10