Work

High Resolution 3-D Laser Direct-Write Patterning

Year: 2010

Type: conference-paper

Source: Conference on Lasers and Electro-Optics

DOI: 10.1364/cleo.2010.jtua1

Authors: Linjie Li, Rafael R. Gattass, Michael Stocker, Erez Gershgoren, Hana Hwang, John T. Fourkas

Institution: University of Maryland, College Park

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2000776522

FWCI:

Cites: 5

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Related to: 10