Work

Defect Generation and Evolution in Laser Processing of Si

Year: 2007

Type: conference-paper

Source: International Conference on Advanced Thermal Processing of Semiconductors

DOI: 10.1109/rtp.2007.4383849

Authors: A. La Magna, V. Privitera, G. Mannino, Guglielmo Fortunato, Massimo Cuscuna, B. G. Svensson, E. Monakhov, K. Kuitunen, J. Slotte, F. Tuomisto

Institutions: Institute for Microelectronics and Microsystems, University of Oslo

Language: English

Topic: Laser Material Processing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2001129720

FWCI: 1.011

Cites: 16

Cited by: 2

Related to: 10