Work

Acoustically coupled thickness-mode AIN-on-Si band-pass filters-part I: principle and devices

Year: 2012

Type: article

Source: IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

DOI: 10.1109/tuffc.2012.2451

Authors: Wanling Pan, V. A. Thakar, M. Rais-Zadeh, F. Ayazi

Institutions: Georgia Institute of Technology, University of Michigan

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2001726540

FWCI: 0.546

Cites: 25

Cited by: 12

Related to: 10