Capacitance estimate for electrostatically actuated narrow microbeams
Year: 2006
Type: article
Source: Micro & Nano Letters
DOI: 10.1049/mnl:20065046
Authors: R.C. Batra, M. Porfiri, D. Spinello
Institution: Virginia Tech
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2002021038