Work

Electrostatic-pneumatic membrane mirror with positive or negative variable optical power

Year: 2013

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.2008440

Authors: Mohammad J. Moghimi, Chris Wilson, David L. Dickensheets

Institutions: Montana State University, Bridger Photonics (United States)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Montana Board of Research and Commercialization Technology

OpenAlex ID: W2002138652

FWCI: 1.216

Cites:

Cited by: 5

Related to: 10