Work

Scanning silicon micromirror using a bidirectionally movable magnetic microactuator

Year: 2000

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.396520

Authors: Hyoung J. Cho, Jun Yan, Stephen T. Kowel, Fred R. Beyette, Jr., Chong H. Ahn

Institution: University of Cincinnati

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: University of Cincinnati

OpenAlex ID: W2002311629

FWCI: 0.956

Cites:

Cited by: 3

Related to: 10