Work

Design of a sampling strategy for measuring and compensating for overlay errors in semiconductor manufacturing

Year: 2003

Type: article

Source: International Journal of Production Research

DOI: 10.1080/0020754031000087256

Authors: C.-F. Chien, K.-H. Chang, C.-P. Chen

Institutions: National Tsing Hua University, Macronix International (Taiwan)

Language: English

Topic: Advanced Statistical Process Monitoring

Subfield: Statistics, Probability and Uncertainty

Field: Decision Sciences

Domain: Social Sciences

Open Access status: closed

OpenAlex ID: W2003132325

FWCI: 1.833

Cites:

Cited by: 36

Related to: 10