High-κ gate dielectrics: Current status and materials properties considerations
Year: 2001
Type: article
Source: Journal of Applied Physics
DOI: 10.1063/1.1361065
Authors: G. D. Wilk, R. M. Wallace, J. M. Anthony
Institutions: University of North Texas, University of South Florida
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2003645630