Work

Variable-focus SU-8 membrane mirror with enhanced stroke using feedback control

Year: 2009

Type: conference-paper

Source: International Conference on Optical MEMS and Nanophotonics

DOI: 10.1109/omems.2009.5338541

Authors: Sarah Lukes, B. Jeffrey Lutzenberger, Erwin Dunbar, Steven R. Shaw, David L. Dickensheets

Institution: Montana State University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2003905027

FWCI:

Cites: 1

Cited by: 4

Related to: 10