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Session 3 Device technology — Insulators and isolation

Year: 1982

Type: conference-paper

Source: Technical digest - International Electron Devices Meeting/Technical digest

DOI: 10.1109/iedm.1982.190206

Authors: R.B. Fair, F. Schwettmann

Institution: RTI International

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2004422403

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