Work

A new method for the calibration of the vertical scale of a stylus profilometer using multiple delta-layer films

Year: 2007

Type: article

Abstract: A new method for the vertical scale calibration in step height measurement has been established using a multiple delta-layer film. The vertical scale of a stylus profilometer can be traceable to the length unit by the certified film thickness in a multiple delta-layer. A Si/Ge multiple delta-layer film with six Si layers separated by Ge delta-layers was developed. The total thickness and delta-layer spacing were certified by high resolution transmission electron microscopy. Six craters with different depth were formed on the Si/Ge multiple delta-layer film by ion beam sputtering via SIMS depth profiling. The depths of the craters can be determined from the certified depth of the delta-layer and direct measurements using a stylus profilometer calibrated by a step-height standard. The vertical scale of a stylus profilometer can be calibrated by the slope and the offset of the measured crater depth fitted as a function of the certified nominal thickness.

Source: Measurement Science and Technology

DOI: 10.1088/0957-0233/18/9/002

Authors: Kyung Joong Kim, Chil Seong Jung, Tae Eun Hong

Institutions: Korea Research Institute of Standards and Science, SK Group (United States), Korea Basic Science Institute

Language: English

Topic: Scientific Measurement and Uncertainty Evaluation

Subfield: Statistics, Probability and Uncertainty

Field: Decision Sciences

Domain: Social Sciences

Open Access status: bronze

Funder: Korea Research Institute of Standards and Science

OpenAlex ID: W2004482707

FWCI: 1.852

Cites: 8

Cited by: 15

Related to: 10