Work

Sputtering behavior and evolution of depth resolution upon low energy ion irradiation of GaAs

Year: 2010

Type: article

Source: Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI: 10.1116/1.3514117

Authors: M. J. P. Hopstaken, M. S. Gordon, D. Pfeiffer, D. K. Sadana, T. Topuria, P. M. Rice, C. Gerl, M. Richter, C. Marchiori

Institutions: IBM Research - Thomas J. Watson Research Center, IBM Research - Almaden, IBM Research - Zurich

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2005836486

FWCI: 0.944

Cites: 42

Cited by: 5

Related to: 10