Photothermal wave imaging of metal-oxide-semiconductor field-effect transistor structures
Year: 1988
Type: article
Source: Journal of Applied Physics
DOI: 10.1063/1.340468
Authors: Andreas Mandelis, Andrew Williams, Edwin K. M. Siu
Institution: University of Toronto
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2006166757
