Surface micromachined, complementary-metal-oxide-semiconductor compatible tunable capacitor with 14:1 continuous tuning range
Year: 2008
Type: article
Source: Applied Physics Letters
DOI: 10.1063/1.2838447
Authors: Chuang-Yuan Lee, Wei Pang, Shih-Jui Chen, Derrick Chi, Hongyu Yu, Eun Sok Kim
Institution: University of Southern California
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2006457435